Heat Transfer Fluids for Semiconductor Processes
In semiconductor manufacturing, controlling temperature is critical for the precision and reliability of processes such as etching, deposition, and wafer testing. Heat transfer fluids (HTFs) play a key role in managing these thermal environments.
Boiling points ranging 55°C to 270°C.
Specialty polymers serve as an effective heat exchange medium due to their excellent dielectric properties and chemical stability, functioning well at both very low and elevated temperatures. Maintaining a controlled and constant temperature during these operations is crucial to ensure the wafers remain flawless.
High-performance heat transfer fluid.
Galden® PFPE is an inert, dielectric, high-performance heat transfer fluid with boiling points ranging 55°C (131°F) to 270°C (518°F). This range is broader than that of other fluorinated heat transfer fluids, allowing for end-use operation temperatures up to 290°C (554°F).
Key Features:
- Stability: High chemical, thermal, and oxidative resistance
- Safety: Non-flammable (no flash point) and non-toxic
- Compatibility: Excellent compatibility with a variety of plastics, metals, and elastomers
- Temperature Range: 55°C to 270°C (131°F to 518°F)
- Vapor Pressure: Low vapor pressure
- Viscosity: Good viscosity at low temperatures
- Electrical Properties: High dielectric strength and high resistivity
- Low Miscibility: Low miscibility with water and solvents, making it easy to recover in case of leakage with no residue.
Shelf Life Guidelines
It is strongly recommended to use all fluids and greases at the time of receipt. However, if storage is necessary, rotate older stock use first and observe the recommended parameters listed below.
Galden Fluids
Galden fluids have a guaranteed shelf life of a minimum of 5 years the date of shipment, provided they are stored in their original sealed container at ambient temperatures.